Isotopically-enriched boron-containing compounds, and methods of making and using same

US9142387B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Robert Kaim · Brookline, US
• Joseph D. Sweeney · New Milford, US
• Oleg Byl · Southbury, US
• Sharad N. Yedave · Danbury, US
• Edward E. Jones · Woodbury, US
• Peng Zou · Shanghai, CN
• Ying Tang · Danbury, US
• Barry Lewis Chambers · Midlothian, US
• Richard S. Ray · Williston, US

Key dates

• Filing date: Dec 3, 2013
• Grant date: Sep 22, 2015
• Expiry date: Jan 31, 2034

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P20/133
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of B2F4. Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use.