Multi-beam scanning electron beam device and methods of using the same

US9153413B2 · kind B2 · utility

Assignee

• Applied Materials Israel Ltd. · IL

Inventors

• Gilad Almogy · Givatayim, IL
• Avishai Bartov · Hod HaSharon, IL
• Juergen Frosien · Ottobrunn, DE
• Pavel Adamec · Haar, DE
• Helmut Banzhof · Poing, DE

Key dates

• Filing date: Feb 22, 2008
• Grant date: Oct 6, 2015
• Expiry date: Mar 31, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2817
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.