Detection method for use in charged-particle microscopy
US9153416B2 · kind B2 · utility
1Cited by
29References
20Claims
0Family size
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Key dates
| Filing date | May 23, 2014 |
| Grant date | Oct 6, 2015 |
| Priority date | — |
| Expiry date | May 23, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.