Metal-oxide-metal (MOM) capacitor with enhanced capacitance
US9153642B2 · kind B2 · utility
10Cited by
6References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2013 |
| Grant date | Oct 6, 2015 |
| Priority date | — |
| Expiry date | Mar 5, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A particular metal-oxide-metal (MOM) capacitor device includes a conductive gate material coupled to a substrate. The MOM capacitor device further includes a first metal structure coupled to the conductive gate material. The MOM capacitor device further includes a second metal structure coupled to the substrate and proximate to the first metal structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.