Anhydride copolymer top coats for orientation control of thin film block copolymers

US9157008B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• Carlton G. Willson · Austin, US
• Christopher John Ellison · Austin, US
• Takehiro Seshimo · Kawasaki, JP
• Julia Cushen · San Francisco, US
• Christopher M. Bates · Austin, US
• Leon Dean · Spokane, US
• Logan J. Santos · Austin, US
• Erica L. Rausch · Austin, US

Key dates

• Filing date: Feb 7, 2013
• Grant date: Oct 13, 2015
• Expiry date: Feb 7, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31855
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films.