Patent · US Active

Method of analyzing a sample and charged particle beam device for analyzing a sample

US9159532B2 · kind B2 · utility

1Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Edward A. Hill · Oceanside, US
Stewart Bean · St Ives, GB

Key dates

Filing date	Jan 8, 2014
Grant date	Oct 13, 2015
Priority date	—
Expiry date	Apr 13, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2809
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.