Reflective optical imaging system

US9188771B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Aurelian Dodoc · Heidenheim an der Brenz, DE
• Christoph Zaczek · Heubach, DE
• Sascha Migura · Aalen, DE
• Gerhard Braun · Judenhof, DE
• Hans-Juergen Mann · Oberkochen, DE
• Hans-Jochen Paul · Aalen, DE

Key dates

• Filing date: Dec 7, 2011
• Grant date: Nov 17, 2015
• Expiry date: Sep 20, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70233
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical imaging system serving for imaging a pattern arranged in an object plane of the imaging system into an image plane of the imaging system with the aid of electromagnetic radiation from a wavelength range around a main wavelength λ0 has a multiplicity of mirrors. Each mirror has a mirror surface having a reflective layer arrangement having a sequence of individual layers.