Patent · US Active

Modular prober and method for operating same

US9194885B2 · kind B2 · utility

2Cited by

3References

11Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Stojan Kanev · Sacka, DE
Botho Hirschfeld · Dresden, DE
Axel Becker · Altrip, DE
Ulf Hackius · Dresden, DE

Key dates

Filing date	Sep 2, 2011
Grant date	Nov 24, 2015
Priority date	—
Expiry date	Apr 1, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/31907
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a prober for checking and testing electronic semiconductor components and methods of using the same. The prober comprises at least two checking units, each of which is equipped with a chuck, probes, and a positioning unit, and each of which is assigned to a machine control system and a process control system. The prober further comprises a loading unit for automatically loading both testing units and an additional loader for manually loading at least one of the testing units, a user interface, and a module control system for controlling the process control systems and/or the machine control systems and the loading unit. The user interface can optionally be connected to at least one of the process control systems or the module control system by means of a switching device of the prober.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.