Methods of using a trench salicide routing layer

US9196548B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Mahbub Rashed · Cupertino, US
• Srikanth B. Samavedam · Austin, US
• David Doman · Austin, US
• Navneet Jain · Milpitas, US
• Subramani Kengeri · Norwood, US
• Suresh Venkatesan · Los Gatos, US

Key dates

• Filing date: Dec 28, 2012
• Grant date: Nov 24, 2015
• Expiry date: May 20, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D86/215

Abstract

Methodology enabling selectively connecting fin structures using a segmented trench salicide layer, and the resulting device are disclosed. Embodiments include: providing on a substrate at least one gate structure; providing first and second fin structures in a vertical direction intersecting with the at least one gate structure; and providing a first segment of a salicide layer, the first segment being formed along a horizontal direction and being connected with the second fin structure and separated from the first fin structure.