Thermal anneal using word-line heating element

US9202572B2 · kind B2 · utility

Assignee

• Rambus Inc. · US

Inventors

• Gary B. Bronner · Stormville, US
• Brent Haukness · Monte Sereno, US
• Mark A. Horowitz · Palo Alto, US
• Mark D. Kellam · Siler City, US
• Fariborz Assaderaghi · Jefferson Valley, US

Key dates

• Filing date: Dec 5, 2013
• Grant date: Dec 1, 2015
• Expiry date: Dec 5, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/324
• WIPO field: Computer technology
• WIPO sector: Electrical engineering

Abstract

In response to detecting an event during operation of an integrated-circuit memory device containing charge-storing memory cells, an electric current is enabled to flow through a word line coupled to the charge-storing memory cells for a brief interval to heat the charge-storing memory cells to an annealing temperature range.