Memory gate landing pad made from dummy features
US9209197B2 · kind B2 · utility
3Cited by
20References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2012 |
| Grant date | Dec 8, 2015 |
| Priority date | — |
| Expiry date | Feb 27, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments described herein generally relate to landing gate pads for contacts and manufacturing methods therefor. A bridge is formed between two features to allow a contact to be disposed, at least partially, on the bridge. Landing the contact on the bridge avoids additional manufacturing steps to create a target for a contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.