Generalized virtual inspector
US9222895B2 · kind B2 · utility
78Cited by
32References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2014 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Feb 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30252
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Generalized virtual inspectors are provided. One system includes two or more actual systems configured to perform one or more processes on specimen(s) while the specimen(s) are disposed within the actual systems. The system also includes one or more virtual systems coupled to the actual systems to thereby receive output generated by the actual systems and to send information to the actual systems. The virtual system(s) are configured to perform one or more functions using at least some of the output received from the actual systems. The virtual system(s) are not capable of having the specimen(s) disposed therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.