Mass flow controller system
US9223318B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2010 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Mar 24, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7784
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A mass flow controller with high accuracy flow rate output control is disclosed. In the mass flow controller, relation data that indicates a corresponding relation between a flow rate of a reference gas and a CF value of a sample gas is stored, a target flow rate is converted into a reference gas flow rate by the use of a predetermined CF value, a sample gas flow rate is calculated from the converted reference gas flow rate and a CF value corresponding to the reference gas flow rate, the sample gas flow rate is compared with the target flow rate, and the CF value that is used for conversion of the reference gas flow rate or calculation of the sample gas flow rate is updated by the use of the corresponding relation based on the error between the sample gas flow rate and the target flow rate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.