Trench gated power device with multiple trench width and its fabrication process
US9224855B2 · kind B2 · utility
6Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2014 |
| Grant date | Dec 29, 2015 |
| Priority date | — |
| Expiry date | Mar 29, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/516
Abstract
Power devices, and related process, where both gate and field plate trenches have multiple stepped widths, using self-aligned process steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.