Patent · US Active

Retaining ring with attachable segments

US9227297B2 · kind B2 · utility

7Cited by

15References

21Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Irfanulla Khuddus Rahmathullah · Bengaluru, IN
Bopanna Ichettira Vansantha · Bengaluru, IN
Padma Gopalakrishnan · Fremont, US
Abraham Palaty · Thrissur, IN
Aswathnarayanaiah Ravi · Bengaluru, IN
Ashish Bhatnagar · Fremont, US
Young J. Paik · Campbell, US
Stacy Meyer · San Jose, US
Daniel L. Martin · Palo Alto, US

Key dates

Filing date	Mar 19, 2014
Grant date	Jan 5, 2016
Priority date	—
Expiry date	Mar 19, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B37/32
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A retaining ring includes a generally annular upper portion having a top surface configured to be connected to a base of a carrier head and a lower surface, and a plurality of substantially identical arcuate segments detachably secured to the upper portion to form an annular lower portion. Each of the arcuate segments has an upper surface that abuts the lower surface of the upper portion and a bottom surface for contacting a polishing pad during polishing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.