Measurement of line-edge-roughness and line-width-roughness on pre-layered structures
US9236219B2 · kind B2 · utility
20Cited by
4References
21Claims
0Family size
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Key dates
| Filing date | May 3, 2013 |
| Grant date | Jan 12, 2016 |
| Priority date | — |
| Expiry date | May 3, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Measurements of line roughness are separated into groups depending upon pre-layers. Image data collected from similar pre-layer types are considered together in order to separate effects of line roughness from distortion of measurements caused by the pre-layers. The resulting line roughness measurements are used to estimate an aspect of line quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.