Patent · US Active

Structure for metal oxide semiconductor capacitor

US9245884B1 · kind B1 · utility

5Cited by
8References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 12, 2014
Grant dateJan 26, 2016
Priority date
Expiry dateDec 12, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A design structure for a semiconductor structure is disclosed. The semiconductor structure can include a substrate, a set of semiconductor fins positioned on the substrate and positioned approximately parallel lengthwise to one another, a first gate layer and a second gate layer deposited on the substrate and on the set of semiconductor fins approximately perpendicular lengthwise to the set of semiconductor fins. The semiconductor structure can include an interconnect layer deposited on the substrate and on the set of semiconductor fins approximately perpendicular lengthwise to the set of semiconductor fins. The interconnect layer can be positioned between the first gate layer and the second gate layer at a first interconnect distance from the first gate layer and a second interconnect distance from the second gate layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.