Patent · US Active

Method for processing and/or for observing an object, and particle beam device for carrying out the method

US9251997B2 · kind B2 · utility

1Cited by

6References

26Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Josef Biberger · Rottenburg a. d. Laaber, DE
Ralph Pulwey · Aalen, DE
Katja Tsyrulin · Aalen, DE
Roland Salzer · Leipzig, DE

Key dates

Filing date	Aug 19, 2014
Grant date	Feb 2, 2016
Priority date	—
Expiry date	Aug 19, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31749
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method is provided for processing and/or observing an object using at least one particle beam that is scanned over the object. A scan region on the object is determined, the scan region having scan lines, and the particle beam is moved in a first scanning direction along one of the scan lines. The first scanning direction is changed to a second scanning direction at a change-of-direction time. Changing from the first scanning direction to the second scanning direction comprises setting of a point of rotation in that scan line of the scan region in which the particle beam is situated at the change-of-direction time, with an axis of rotation extending through the point of rotation. The first scanning direction is changed into the second scanning direction by rotating the scan region about the axis of rotation, with the point of rotation being selected dependent on the direction of rotation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.