Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus
US9255892B2 · kind B2 · utility
3Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2015 |
| Grant date | Feb 9, 2016 |
| Priority date | — |
| Expiry date | Aug 13, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A second set of superimposed gratings are superposed over a first set of superimposed gratings. The second set of gratings have a different periodicity from the first set of gratings or a different orientation. Consequently the first order diffraction pattern from the second set of superimposed gratings can be distinguished from the first order diffraction pattern from the first set of superimposed gratings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.