Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
US9257261B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 27, 2012 |
| Grant date | Feb 9, 2016 |
| Priority date | — |
| Expiry date | Sep 27, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for rapid switching between operating modes with differing beam currents in a charged particle system is disclosed. Many FIB milling applications require precise positioning of a milled pattern within a region of interest (RoI). This may be accomplished by using fiducial marks near the RoI, wherein the FIB is periodically deflected to image these marks during FIB milling. Any drift of the beam relative to the RoI can then be measured and compensated for, enabling more precise positioning of the FIB milling beam. It is often advantageous to use a lower current FIB for imaging since this may enable higher spatial resolution in the image of the marks. For faster FIB milling, a larger beam current is desired. Thus, for optimization of the FIB milling process, a method for rapidly switching between high and low current operating modes is desirable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.