Cryopump
US9266038B2 · kind B2 · utility
4Cited by
13References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2012 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Jun 5, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49236
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.