Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
US9268242B2 · kind B2 · utility
3Cited by
48References
38Claims
0Family size
Assignee
Inventors
- Theodorus Petrus Maria Cadee
- Johannes Henricus Wilhelmus Jacobs
- Nicolaas Ten Kate
- Erik Roelof Loopstra
- Aschwin Lodewijk Hendricus Johannes Vermeer
- Jeroen Johannes Sophia Maria Mertens
- Christianus Gerardus Maria De Mol
- Marcel Johannus Elisabeth Hubertus Muitjens
- Antonius Johannus Van Der Net
- Joost Jeroen Ottens
- Johannes Anna Quaedackers
- Mana Elisabeth Reuhman-Huisken
- Marco Koert Stavenga
- Patricius Aloysius Jacobus Tinnemans
- Martinus Cornelis Maria Verhagen
- Jacobus Johannus Leonardus Hendricus Verspay
- Frederik Eduard De Jong
- Koen Goorman
- Boris Menchtchikov
- Herman Boom
- Stoyan Nihtianov
- Richard Moerman
- Martin Frans Pierre Smeets
- Bart Leonard Peter Schoondermark
- Franciscus Johannes Joseph Janssen
- Michel Riepen
Key dates
| Filing date | Aug 26, 2010 |
| Grant date | Feb 23, 2016 |
| Priority date | — |
| Expiry date | Sep 28, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70875
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic apparatus is described having a liquid supply system configured to at least partly fill a space between a projection system of the lithographic apparatus and a substrate with liquid, a barrier member arranged to substantially contain the liquid within the space, and a heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.