Inventor · Son en Breugel, NL

Richard Moerman

16Patents
3h-index
69Co-inventors
59Inventor score

Filing activity: Sep 24, 2004 → Nov 13, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7804575B2 Lithographic apparatus and device manufacturing method having liquid evaporation control Physics 16 Expired
US7808614B2 Lithographic apparatus and device manufacturing method Physics 5 Active
US9268242B2 Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Physics 3 Active
US9188880B2 Lithographic apparatus and device manufacturing method involving a heater Physics 3 Active
US7522261B2 Lithographic apparatus and device manufacturing method Physics 3 Expired
US8405817B2 Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method Physics 3 Active
US8330936B2 Lithographic apparatus and device manufacturing method Physics 3 Active
US11378893B2 Lithographic apparatus and device manufacturing method involving a heater Physics 1 Active
US8711326B2 Fluid handling structure, a lithographic apparatus and a device manufacturing method Physics 1 Active
US9036127B2 Lithographic apparatus Physics 1 Active
US10838310B2 Lithographic apparatus and device manufacturing method involving a heater Physics 1 Active
US8129097B2 Immersion lithography Physics 0 Active
US10254663B2 Lithographic apparatus and device manufacturing method involving a heater Physics 0 Active
US9465302B2 Lithographic apparatus Physics 0 Active
US8427629B2 Lithographic apparatus and device manufacturing method Physics 0 Active
US10649341B2 Lithographic apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.