Richard Moerman
16Patents
3h-index
69Co-inventors
59Inventor score
Filing activity: Sep 24, 2004 → Nov 13, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7804575B2 | Lithographic apparatus and device manufacturing method having liquid evaporation control | Physics | 16 | Expired |
| US7808614B2 | Lithographic apparatus and device manufacturing method | Physics | 5 | Active |
| US9268242B2 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Physics | 3 | Active |
| US9188880B2 | Lithographic apparatus and device manufacturing method involving a heater | Physics | 3 | Active |
| US7522261B2 | Lithographic apparatus and device manufacturing method | Physics | 3 | Expired |
| US8405817B2 | Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method | Physics | 3 | Active |
| US8330936B2 | Lithographic apparatus and device manufacturing method | Physics | 3 | Active |
| US11378893B2 | Lithographic apparatus and device manufacturing method involving a heater | Physics | 1 | Active |
| US8711326B2 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Physics | 1 | Active |
| US9036127B2 | Lithographic apparatus | Physics | 1 | Active |
| US10838310B2 | Lithographic apparatus and device manufacturing method involving a heater | Physics | 1 | Active |
| US8129097B2 | Immersion lithography | Physics | 0 | Active |
| US10254663B2 | Lithographic apparatus and device manufacturing method involving a heater | Physics | 0 | Active |
| US9465302B2 | Lithographic apparatus | Physics | 0 | Active |
| US8427629B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US10649341B2 | Lithographic apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.