Droplet generator steering system
US9279445B2 · kind B2 · utility
2Cited by
15References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2011 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Dec 16, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/54
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.