J. Martin Algots
9Patents
7h-index
27Co-inventors
55Inventor score
Filing activity: Nov 30, 2004 → Jan 17, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7405416B2 | Method and apparatus for EUV plasma source target delivery | Electricity | 64 | Expired |
| US7372056B2 | LPP EUV plasma source material target delivery system | Electricity | 48 | Expired |
| US7122816B2 | Method and apparatus for EUV light source target material handling | Electricity | 27 | Expired |
| US7838854B2 | Method and apparatus for EUV plasma source target delivery | Electricity | 17 | Active |
| US7366219B2 | Line narrowing module | Electricity | 16 | Expired |
| US7589337B2 | LPP EUV plasma source material target delivery system | Electricity | 15 | Active |
| US8126027B2 | Line narrowing module | Electricity | 10 | Active |
| US9279445B2 | Droplet generator steering system | Emerging Cross-Sectional Technologies | 2 | Active |
| US8855166B2 | 6 KHz and above gas discharge laser system | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.