Low-voltage IC test for defect screening

US9285417B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Daniel J. Poindexter · Cornwall-on-Hudson, US
• James M. Crafts · Warren, US
• Karre M. Greene · South Burlington, US
• Kenneth A. Lavallee · Colchester, US
• Keith C. Stevens · Saint Albans, US

Key dates

• Filing date: Jan 2, 2013
• Grant date: Mar 15, 2016
• Expiry date: Dec 26, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E60/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

System and method using low voltage current measurements to measure voltage network currents in an integrated circuit (IC). In one aspect, a low voltage current leakage test is applied voltage networks for the IC or microchip via one or more IC chip connectors. One or multiple specifications are developed based on chip's circuit delay wherein a chip is aborted or sorted into a lesser reliability sort depending whether the chip fails specification. Alternately, a low voltage current leakage test begins an integrated circuit test flow. Then there is run a high voltage stress, and a second low voltage current leakage test is thereafter added. Then, there is compared the second low voltage test to the first low V test, and if the measured current is less on second test, this is indicative of a defect present which may result in either a scrap or downgrade reliability of chip.