Light scanning microscope and microscopy method

US9304307B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Wibke Hellmich · Jena, DE
• Gerhard Krampert · Jena, DE
• Matthias Langhorst · Hameln, DE
• Ralf Netz · Jena, DE

Key dates

• Filing date: May 24, 2013
• Grant date: Apr 5, 2016
• Expiry date: Dec 27, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/008
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A light scanning microscope with an illumination module generates several illumination beams and moves them, in each case as a spot, in a predefined region of a sample to excite sample radiation. A detector module for confocal detection of the sample radiation excited by each spot includes a first detector, an imaging lens system, having an optical axis, for imaging the predefined region along an imaging beam path running from the sample as far as the first detector, and a rotatable diaphragm with several pinholes located in a pinhole plane. The diaphragm, upon rotation, may be located at least partially in the imaging beam path for confocal detection. A second detector may be arranged outside of the imaging beam path. A first beam splitter may be arranged in the imaging beam path between the sample and the diaphragm. The beam splitter deflects sample radiation onto the second detector.