Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery
US9305810B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2012 |
| Grant date | Apr 5, 2016 |
| Priority date | — |
| Expiry date | Oct 11, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87096
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments of the invention relate to a gas delivery system. The gas delivery system includes a fast gas exchange module in fluid communication with one or more gas panels and a process chamber. The fast gas exchange module has first and second sets of flow controllers and each of first and second sets of flow controllers has multiple flow controllers. The flow controller is configured such that each of the flow controllers in the first and second sets of the flow controllers is independently operated to selectively open to divert gas to the process chamber or an exhaust. The first and second sets of flow controllers are operated for synchronized switching of gases in a pre-determined timed sequence of flow controller actuation. The invention enables fast switch of resultant gas flow in the process chamber while having individual flow controller operated at lower switching speed to provide longer service life.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.