Roy C. Nangoy
16Patents
7h-index
22Co-inventors
62Inventor score
Filing activity: Jul 23, 2004 → Jun 10, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7433759B2 | Apparatus and methods for positioning wafers | Electricity | 52 | Active |
| US9196498B1 | Stationary actively-cooled shadow ring for heat dissipation in plasma chamber | Electricity | 14 | Active |
| US7155319B2 | Closed loop control on liquid delivery system ECP slim cell | Emerging Cross-Sectional Technologies | 13 | Expired |
| US9034771B1 | Cooling pedestal for dicing tape thermal management during plasma dicing | Electricity | 10 | Active |
| US9117868B1 | Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing | Electricity | 10 | Active |
| US9162236B2 | Proportional and uniform controlled gas flow delivery for dry plasma etch apparatus | Electricity | 8 | Active |
| US8753474B2 | Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor | Electricity | 7 | Active |
| US9681497B2 | Multi zone heating and cooling ESC for plasma process chamber | Electricity | 7 | Active |
| US8096852B2 | In-situ performance prediction of pad conditioning disk by closed loop torque monitoring | Performing Operations; Transporting | 7 | Active |
| US7963826B2 | Apparatus and methods for conditioning a polishing pad | Performing Operations; Transporting | 6 | Active |
| US9305810B2 | Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery | Emerging Cross-Sectional Technologies | 5 | Active |
| US9488315B2 | Gas distribution apparatus for directional and proportional delivery of process gas to a process chamber | Emerging Cross-Sectional Technologies | 3 | Active |
| US8920599B2 | High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity | Electricity | 1 | Active |
| US9070633B2 | Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor | Electricity | 1 | Active |
| US11251047B2 | Clog detection in a multi-port fluid delivery system | Performing Operations; Transporting | 0 | Active |
| US12240078B2 | Cleaning system for polishing liquid delivery arm | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.