Patent · US Active

Particle beam device comprising an electrode unit

US9312093B1 · kind B1 · utility

1Cited by

3References

21Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Joerg Fober · Heubach, DE
Edgar Fichter · Aalen, DE
Kai Schubert · Oberkochen, DE
Dirk Preikszas · Oberkochen, DE
Christian Hendrich · Aalen, DE
Momme Mommsen · Oberkochen, DE
Michael Schnell · Ingolstadt, DE
Lorenz Lechner · Dublin, US

Key dates

Filing date	Jul 2, 2014
Grant date	Apr 12, 2016
Priority date	—
Expiry date	Jul 2, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/153
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam device comprises a beam generator for generating a particle beam having charged particles and an electrode unit having a first electrode and a second electrode, wherein the first electrode interacts with the second electrode, in particular for guiding, shaping, aligning or correcting the particle beam. Moreover, the particle beam device comprises a low-pass filter being connected with at least one of: the first electrode and the second electrode, using an electrical connection. Additionally, the particle beam device comprises a mounting unit having an opening for the passage of the particle beam, wherein the at least one low-pass filter, the first electrode and the second electrode are arranged at the mounting unit. The electrode unit may comprise more than two electrodes, for example up to 16 electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.