Profile measuring instrument, adjusting method for profile measuring instrument, and profile measuring method
US9316476B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2013 |
| Grant date | Apr 19, 2016 |
| Priority date | — |
| Expiry date | May 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/201
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A profile measuring instrument usable to perform a rotary scanning measurement and a linear scanning measurement on a workpiece in the form of a revolution solid, includes: a turntable on which the workpiece is mounted, the turntable being rotatable around a predetermined rotation axis; a rotary scanning measurement unit being adapted to measure a displacement of a surface of the workpiece mounted on the turntable; a linear scanning measurement unit being adapted to measure a profile of the surface of the workpiece mounted on the turntable along a predetermined measurement axis; and an aligning mechanism being adapted to relatively move the linear scanning measurement unit and the turntable in a direction intersecting with the measurement axis. The linear scanning measurement unit and the turntable are adjusted to relative positions at which the measurement axis passes through the rotation axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.