Patent · US Active

Electrostatic actuator with short circuit protection and process

US9321265B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Xerox Corporation · US

Inventors

Peter J. Nystrom · Webster, US
Mark A. Cellura · Webster, US
Gary D. Redding · Victor, US
Peter M. Gulvin · Webster, US

Key dates

Filing date	Feb 28, 2014
Grant date	Apr 26, 2016
Priority date	—
Expiry date	Jul 20, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB41J2002/14491
WIPO fieldTextile and paper machines
WIPO sectorMechanical engineering

Abstract

An electrostatic actuator for a printhead. The electrostatic actuator may include a substrate. A dielectric layer may be disposed on the substrate. An electrode layer may be disposed on the dielectric layer. A first standoff layer may be disposed at least partially on the electrode layer. A second standoff layer may be disposed at least partially on the electrode layer and at least partially on the first standoff layer. A portion of the second standoff layer disposed on the electrode layer may be removed to form one or more landing pads. A membrane may be disposed at least partially on the second standoff layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.