Sonic energy to generate active species for surface preparation, cleaning, and etching
US9327322B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 1, 2012 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Nov 20, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F1/36
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Provided is a method for generating active species in a treatment liquid used in a surface treatment system, the surface treatment system comprising a processing chamber and a treatment liquid delivery system, the treatment liquid delivery system having a mixing zone and an active species generation zone. A substrate and a treatment liquid comprising one or more chemical solutions and/or one or more process gases are provided. Sonic energy is applied to the treatment liquid in a mixing zone and/or an active species generation zone using one or more sonic devices. One or more selected surface treatment operating variables are controlled to optimize generation of active species in the treatment liquid. The one or more selected surface treatment operating variables are adjusted in order to meet one or more surface treatment objectives.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.