Lithographic apparatus, fluid combining unit and device manufacturing method
US9330912B2 · kind B2 · utility
1Cited by
22References
19Claims
0Family size
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Key dates
| Filing date | Sep 21, 2011 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Oct 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70341
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.