Charged particle detection system and multi-beamlet inspection system
US9336981B2 · kind B2 · utility
27Cited by
2References
15Claims
0Family size
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Key dates
| Filing date | Mar 31, 2011 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Feb 6, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle detection system comprises plural detection elements and a multi-aperture plate in proximity of the detection elements. Charged particle beamlets can traverse the apertures of the multi-aperture plate to be incident on the detection elements. More than one multi-aperture plate can be provided to form a stack of multi-aperture plates in proximity of the detector. A suitable electric potential supplied to the multi-aperture plate can have an energy filtering property for the plural charged particle beamlets traversing the apertures of the plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.