Patent · US Active

Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope

US9336983B2 · kind B2 · utility

4Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michael Budach · Hanau, DE
Christof Baur · Darmstadt, DE
Dajana Cujas · Seeheim-Jugenheim, DE
Robert Heberlein · Hemsbach, DE
Marion Batz · Wiesbaden, DE

Key dates

Filing date	Jun 30, 2015
Grant date	May 10, 2016
Priority date	—
Expiry date	Jun 30, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2826
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.