Multiple radio frequency power supply control of frequency and phase
US9336995B2 · kind B2 · utility
13Cited by
2References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2014 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Jul 27, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.