Spectral control system
US9341769B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2013 |
| Grant date | May 17, 2016 |
| Priority date | — |
| Expiry date | Jul 18, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure is directed to a system and method of controlling spectral attributes of illumination. According to various embodiments, a portion of illumination including an excluded selection of illumination spectra is blocked, while another portion of the illumination including a transmitted selection of illumination spectra is directed along an illumination path. In some embodiments, optical metrology is performed utilizing the spectrally controlled illumination to enhance measurement capability. For instance, the spectral attributes of illumination utilized to analyze different portions of a sample, such as different semiconductor layers, may be selected according to certain measurement characteristics associated with the analyzed portions of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.