Method and apparatus for multiple-channel pulse gas delivery system
US9348339B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2011 |
| Grant date | May 24, 2016 |
| Priority date | — |
| Expiry date | Jul 16, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0623
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A pulse gas delivery system for delivering a sequence of pulses of prescribed amounts of gases to a process tool, comprises: (a) a plurality of channels, each including (i) a gas delivery chamber; (ii) an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and (iii) an outlet valve connected so as to control the amount of gas flowing out of the corresponding gas delivery chamber; and (b) a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process tool in a predetermined sequence in accordance with a pulse gas delivery process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.