Charged-particle lens that transmits emissions from sample
US9349564B2 · kind B2 · utility
0Cited by
7References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2014 |
| Grant date | May 24, 2016 |
| Priority date | — |
| Expiry date | Nov 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2602
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.