Patent · US Active

Particle optical system

US9349571B2 · kind B2 · utility

25Cited by

2References

18Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Thomas Kemen · Meppen, DE
Pascal Anger · Aalen, DE
Dirk Zeidler · Oberkochen, DE
Gerd Benner · Aalen, DE

Key dates

Filing date	Sep 9, 2014
Grant date	May 24, 2016
Priority date	—
Expiry date	Sep 9, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2802
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.