Substrate gripper apparatus and methods
US9352471B1 · kind B1 · utility
3Cited by
20References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2015 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Jan 21, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J15/0273
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate gripper apparatus is provided. Substrate gripper apparatus includes a body, a first slide member moveable relative to the body, a first finger mounting member coupled to the first slide member, a first lower finger coupled to the first finger mounting member, and a first pivoting finger coupled to the first finger mounting member. First pivoting member may impose a force on a substrate due to gravity. Methods of operating the substrate gripper apparatus as well as other aspects are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.