Particle beam device and method for operating a particle beam device
US9354188B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 6, 2013 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Sep 6, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2538
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle beam device, in particular an electron beam device, is provided having a beam generator for generating a primary particle beam, an objective lens for focusing the primary particle beam onto an object, and a detector for detecting particles emitted by the object. The objective lens has at least one magnetic unit, with the magnetic unit generating at least one first crossover and at least one second crossover. The first crossover is arranged in the objective lens or in a region between the objective lens and the object. The second crossover is arranged at the object. The device permits the examination of the object using particles which have a low energy, with good imaging properties. A method for operating the particle beam device is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.