Inspection having a segmented pupil
US9354212B2 · kind B2 · utility
1Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2014 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Jun 9, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8822
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.