Detection of selected defects in relatively noisy inspection data
US9355440B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2012 |
| Grant date | May 31, 2016 |
| Priority date | — |
| Expiry date | Oct 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for detection of selected defects in relatively noisy inspection data are provided. One method includes applying a spatial filter algorithm to inspection data acquired across an area on a substrate to determine a first portion of the inspection data that has a higher probability of being a selected type of defect than a second portion of the inspection data. The selected type of defect includes a non-point defect. The inspection data is generated by combining two or more raw inspection data corresponding to substantially the same locations on the substrate. The method also includes generating a two-dimensional map illustrating the first portion of the inspection data. The method further includes searching the two-dimensional map for an event that has spatial characteristics that approximately match spatial characteristics of the selected type of defect and determining if the event corresponds to a defect having the selected type.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.