Apparatus and method for polarization diversity imaging and alignment
US9361533B2 · kind B2 · utility
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9References
20Claims
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Key dates
| Filing date | Nov 16, 2012 |
| Grant date | Jun 7, 2016 |
| Priority date | — |
| Expiry date | May 1, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/58
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of obtaining two orthogonally polarized super-resolution images is provided. A first diffraction-limited image is obtained using horizontally polarized light; a second diffraction-limited image is obtained using vertically polarized light; and, the first and second images are processed so as to yield a convoluted image having super diffraction-limited performance in both dimensions. Enhanced alignment of CAD image to acquired image is facilitated using the horizontally and vertically polarized images.
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