Ultrasonic cleaning method and apparatus therefore
US9364870B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2015 |
| Grant date | Jun 14, 2016 |
| Priority date | — |
| Expiry date | Oct 29, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2209/005
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Ultrasonic cleaning apparatuses and methods of cleaning substantially planar articles. An apparatus comprises (i) a substantially circular tank; (ii) a plurality of cleaning fluid inlets for delivering a cleaning fluid to the tank; (iii) an intermediate support for receiving an article to be cleaned; and (iv) an ultrasonic generator coupled to the tank for generating ultrasonic waves in the tank and cleaning fluid received therein. The apparatus is configured to remove particles from a substantially planar article and have them carried by flow of cleaning fluid away from the article and out of the tank. Using such an apparatus, a cleaning method comprises introducing a substantially planar article to be cleaned into the tank; introducing a cleaning fluid into the tank through the plurality of cleaning fluid inlets; and exciting the cleaning fluid with ultrasonic waves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.