Iqbal Shareef
34Patents
8h-index
43Co-inventors
75Inventor score
Filing activity: Mar 28, 1998 → Feb 2, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6778762B1 | Sloped chamber top for substrate processing | Electricity | 60 | Expired |
| US6079353A | Chamber for reducing contamination during chemical vapor deposition | Chemistry; Metallurgy | 32 | Expired |
| US8340827B2 | Methods for controlling time scale of gas delivery into a processing chamber | Emerging Cross-Sectional Technologies | 28 | Active |
| US6114227A | Chamber for reducing contamination during chemical vapor deposition | Chemistry; Metallurgy | 23 | Expired |
| US8794267B2 | Gas transport delay resolution for short etch recipes | Emerging Cross-Sectional Technologies | 12 | Active |
| US7881886B1 | Methods for performing transient flow prediction and verification using discharge coefficients | Emerging Cross-Sectional Technologies | 10 | Active |
| US8521461B2 | Apparatus for delivering a process gas | Emerging Cross-Sectional Technologies | 10 | Active |
| US8851113B2 | Shared gas panels in plasma processing systems | Emerging Cross-Sectional Technologies | 8 | Active |
| US10022689B2 | Fluid mixing hub for semiconductor processing tool | Performing Operations; Transporting | 6 | Active |
| US7822570B2 | Methods for performing actual flow verification | Emerging Cross-Sectional Technologies | 6 | Active |
| US7731798B2 | Heated chuck for laser thermal processing | Performing Operations; Transporting | 6 | Expired |
| US7176405B2 | Heat shield for thermal processing | Performing Operations; Transporting | 5 | Expired |
| US9090972B2 | Gas supply systems for substrate processing chambers and methods therefor | Emerging Cross-Sectional Technologies | 4 | Active |
| US9335768B2 | Cluster mass flow devices and multi-line mass flow devices incorporating the same | Emerging Cross-Sectional Technologies | 3 | Active |
| US9004086B2 | Methods and apparatus for displacing fluids from substrates using supercritical CO2 | Electricity | 3 | Active |
| US10431431B2 | Gas supply delivery arrangement including a gas splitter for tunable gas flow control | Electricity | 3 | Active |
| US10128087B2 | Configuration independent gas delivery system | Emerging Cross-Sectional Technologies | 3 | Active |
| US10943769B2 | Gas distributor and flow verifier | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US9721763B2 | Systems and methods for providing gases to a process chamber | Emerging Cross-Sectional Technologies | 2 | Active |
| US9091397B2 | Shared gas panels in plasma processing chambers employing multi-zone gas feeds | Emerging Cross-Sectional Technologies | 2 | Active |
| US9778083B2 | Metrology method for transient gas flow | Physics | 2 | Active |
| US10002747B2 | Methods and apparatus for supplying process gas in a plasma processing system | Electricity | 2 | Active |
| US9364870B2 | Ultrasonic cleaning method and apparatus therefore | Performing Operations; Transporting | 1 | Active |
| US9721782B2 | Method and apparatus for shaping a gas profile near bevel edge | Chemistry; Metallurgy | 1 | Active |
| US8150646B2 | Methods for delivering a process gas | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.