Semiconductor device and method of manufacturing the same
US9368494B2 · kind B2 · utility
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4Claims
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Key dates
| Filing date | Nov 11, 2014 |
| Grant date | Jun 14, 2016 |
| Priority date | — |
| Expiry date | Nov 11, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/0149
Abstract
A semiconductor device with neck fins comprises a substrate, a plurality of fins having a lower portion and a neck upper portion on the substrate, and insulators disposed between each fin and flush with the lower portion of the fins.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.