Lithographic apparatus with actuator to compensate acoustic vibration
US9378722B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2008 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Jul 16, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K2210/129
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
A lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate. The lithographic apparatus includes an acoustical sensor to measure a first acoustic vibration in a sensor measurement area in the lithographic apparatus. An actuator is provided to generate a second acoustic vibration in at least an area of the lithographic apparatus. Further, a control device is provided having a sensor input to receive a sensor signal of the acoustical sensor and an actuator output to provide an actuator drive signal to the actuator. The control device is arranged to drive the actuator so as to let the second acoustic vibration at least partly compensate in the area the first acoustic vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.